Y. Poplavko, I. Golubeva, and Y. Prokopenko National Technical University of Ukraine 37, Peremogi Ave., Kiev, 03056, Ukraine e-mail: poplavko@ieee.org
Abstract – Possible alternative of low loss and highly tunable MEMS phase shifter is discussed. Dielectric or metallic parts of device should have the piezo-dirigible air gap between them. Important is to provide a strong perturbation in electromagnetic field in the region influenced by the mechanical control. Energy distribution within the device is controlled by piezoelectric actuator, and can be described as a change in effective dielectric permittivity (se^). Some of highly tunable piezoelectric RF MEMS devices are realized experimentally.
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